One-Step Femtosecond Laser Irradiation of Single-Crystal Silicon: Evolution of Micro-Nano Structures and Damage Investigation
As a pillar material of semiconductors, single-crystal silicon (Si) has attracted much attention due to its excellent electronic properties.Meanwhile, femtosecond laser processing as a convenient fabrication method for miniaturized structures provides an effective way to improve the performance of Si-based devices.However, the final-state analysis